Polymer structure modification plasticizers influence

Modifications of the polymer structure can influence the photochemistry as well as the physical chemistry of the resist. Cinnamate groups that are attached pendant to rubbery polymers photolyze much faster than when they are attached to higher Tg, more rigid plastic backbones. It is thought that the cinnamate groups have more mobility in the rubbery matrix to move into the proper orientation for dimerization. ... 

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