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Plasma zone melting

Y Kumashiro, A Itoh, E Sakuma, S Misawa. Plasma jet generator for r-f plasma zone melting. J... [Pg.54]

Y Kumashiro, N Yazawa, S Misawa, A Itoh. RF plasma zone melting apparatus. Plasma Chem Plasma Process 3 249, 1983. [Pg.54]

Figures 1 and 2 shows the principles of thermal and electron beam evaporation. Materials with a low melting point (many metals) are evaporated from graphite boats by resistive heating. For materials with a higher melting point (e.g., metal oxides), electron beam evaporation is commonly used. Evaporation is a fast process with deposition rates of 500-5,000 nm/s for metals and 100-1,000 nm/s for oxides. Film quality and adhesion to the substrate may suffer from the low energy of evaporated particles (0.2-0.5 eV). Modem evaporatiOTi processes therefore make use of an additional plasma. The evaporated particles crossing the plasma zone are activated and ionized and consequently can form a much denser film. Figures 1 and 2 shows the principles of thermal and electron beam evaporation. Materials with a low melting point (many metals) are evaporated from graphite boats by resistive heating. For materials with a higher melting point (e.g., metal oxides), electron beam evaporation is commonly used. Evaporation is a fast process with deposition rates of 500-5,000 nm/s for metals and 100-1,000 nm/s for oxides. Film quality and adhesion to the substrate may suffer from the low energy of evaporated particles (0.2-0.5 eV). Modem evaporatiOTi processes therefore make use of an additional plasma. The evaporated particles crossing the plasma zone are activated and ionized and consequently can form a much denser film.
Figure 7-3. Plasma fiimace for iron reduction from oxides. Reduction in slag zone by thermal arc electrically attached to the melt (1) plasma generator, (2) electrodes, (3) arc. Figure 7-3. Plasma fiimace for iron reduction from oxides. Reduction in slag zone by thermal arc electrically attached to the melt (1) plasma generator, (2) electrodes, (3) arc.

See other pages where Plasma zone melting is mentioned: [Pg.47]    [Pg.47]    [Pg.672]    [Pg.43]    [Pg.43]    [Pg.155]    [Pg.430]    [Pg.227]    [Pg.310]    [Pg.309]    [Pg.434]    [Pg.435]    [Pg.243]    [Pg.483]    [Pg.473]    [Pg.1581]    [Pg.382]    [Pg.5230]    [Pg.320]    [Pg.970]    [Pg.589]    [Pg.625]    [Pg.20]    [Pg.110]    [Pg.133]    [Pg.375]   
See also in sourсe #XX -- [ Pg.192 ]




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