Plasma reactor configuration, schematic

Figure 9.7 Schematic of the plasma reactor configuration. Adapted from Ref 14.

Fig. 19. Schematic of common plasma reactor configurations besides the one shown in Fig. 3a. Reactive ion etching (RIE) (a), magnetically enhanced reactive ion etching (MERIE) (b), barrel (c), and downstream etching (d) reactors. In the barrel and downstream reactors etching is purely by neutral radical...

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