Planar dislocation arrays

Planar defects include grain boundaries, stacking faults, and twins. These defects are formed during ion implantation and thermal and processing. All three types of planar defects are enclosed by a single dislocation or by an array of dislocations separating the faulted area from the normal area or delineating the misorientation between various areas of the semiconductor. 

A small-angle boundary (or a subgrain, a low angle, or a polygoniza-tion boundary— the terms are synonymous) is composed of planar arrays of dislocations formed by the union of two crystals which were... 

R. J. Amodeo, N.M. Ghoniem, 1990, Dislocation dynamics. I. A proposed methodology for deformation micromechanics Dislocation dynamics. 11. Applications to the formation of persistent slip hands, planar arrays, and dislocation cells , Phys. Rev. 

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