Photochemical oxidation of sulfur dioxide

Gerhard, E. R. and Johnstone, H. F 1955 Photochemical oxidation of sulfur dioxide in air. Indust. Engineer. Chem. 47, 972-976. [Pg.187]

A wide variety of interrelated homogenous gas-phase, solution-phase, and heterogenous chemistry may ultimately result in oxidation of SO2 to sulfuric acid in DUV exposure tools. The three main possible reaction pathways for the oxidation of sulfur dioxide to sulfuric acid in the exposure chamber may include (i) direct oxidation of sulfur dioxide by stable atmospheric oxygen, (ii) catalyzed oxidation of sulfur dioxide by metal ions, and (iii) photochemical oxidation of sulfur dioxide by ozone and hydroxyl radical. [Pg.642]