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Performance imaging at the diffraction limit

Although the PSF can vary, in general, with position in the image plane (e.g. when optical aberrations are present or from vignetting), we will assume here that it is [Pg.72]

Since the measured profile is a convolution of the true profile with the optical PSF (which can be calculated), we have an opportunity to improve the fidelity of the profile by deconvolution. If Px(x, y) is known or can be determined, then the [Pg.75]


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