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Passivation of tungsten

Metals commonly used in CMP include tungsten, aluminum, copper, and tantalum. To date there are several mechanisms reported. The passivation of tungsten was first proposed by Kaufman in 199131b and has been widely used in guiding slurry design in the CMP community.7 Figure 4.10 illustrates the passivation and removal procedures. This model involves the formation... [Pg.87]

See other pages where Passivation of tungsten is mentioned: [Pg.49]    [Pg.385]    [Pg.82]   
See also in sourсe #XX -- [ Pg.124 ]



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Of passivity

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