Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Organometallic single-molecule precursors

A comparative study of a series of 28 single organometallic precursors to the binary ceramic phases TiC, TiN, VC, VN is reported. The design of the molecules, their thermal behavior, and their use in CVD applications are described. The influence on the film composition of (1) the nature of the precursor ligands (Cp, Cp, Cl, NR2 with R = Et, SiMe3) and (2) the CVD conditions (hot or cold wall, carrier gas, gas phase composition) is studied in the case of the best candidate precursors. [Pg.158]

See other pages where Organometallic single-molecule precursors is mentioned: [Pg.49]    [Pg.75]    [Pg.190]    [Pg.22]    [Pg.141]    [Pg.822]    [Pg.53]    [Pg.1009]    [Pg.303]    [Pg.185]    [Pg.199]    [Pg.1]    [Pg.269]    [Pg.64]    [Pg.87]    [Pg.45]    [Pg.437]   
See also in sourсe #XX -- [ Pg.60 ]



SEARCH



Organometallic molecules

Organometallic precursor molecules

Organometallic precursors

Precursor molecule

© 2024 chempedia.info