Optimization of Depth Profiling

Optimization of depth profiling relies on selection of proper experimental conditions. Effects of processing parameters on the quality of profiles, including primary beam energy, incident angle of primary beam and the analysis area versus the sputtering area on a sample surface, are briefly introduced in the following section. 

DETECTED REGION k-UNIFORM PENETRATION DETECTED REGION OVER WHOLE CRATER DETECTED REGION WITHIN UNIFORM PENETRATION REGION 

2 Why is C 2+ commonly used as the source of primary ions for dynamic SIMS analysis  

3 What are the main differences between dynamic and static SIMS  

4 We may estimate the lifetime of a surface monolayer by assuming that each primary ion will knock out one atom in the monolayer. Estimate the lifetime of surface monolayer bombarded by primary ion beam densities of 10 nA cm-2 and 0.1 nA cm-2, respectively. Why should the primary ion dose be even less than that based on the lifetime estimation  

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