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Nucleation Processes and General Features

Diamond can grow homoepitaxially on a diamond surface without [Pg.50]

ECR MW PACVDl from a variety of carbon sources. Diamond also nucleates easily on cBN [239]-[24i] jyg identical crystal structure and the [Pg.50]

A conventional growth process in CVD of polycrystalline diamond films typically shows several distinguishable stages,as shown in Fig. 2  [Pg.50]

In an atomistic scale, a surface nucieation process may include the following events  [Pg.54]

Atoms impinge upon thedeposition substrate from the gas phase and become adsorbed onto the surfece. [Pg.54]


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Feature Processing

Nucleation processes

Process features

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