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Normalized image log-slope

The NILS is usually the best single metric forjudging the lithographic usefulness of an aerial image. [Pg.676]

The logarithmic slope of the aerial image is typically called the log-slope, and it is a good metric of the quality of the latent image. It is customary to normalize the image log-slope hy multiplying it hy the nominal line width w of the feature to yield the normalized image log-slope (NILS) as... [Pg.576]

See other pages where Normalized image log-slope is mentioned: [Pg.674] [Pg.676] [Pg.676] [Pg.890] [Pg.674] [Pg.676] [Pg.676] [Pg.890] [Pg.676] [Pg.43] [Pg.106] [Pg.449]

See also in sourсe #XX -- [ Pg.576 , Pg.647 ]

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Log-normal

Slope

Sloping