Non-Thermal RF-CCP Discharges in Moderate Pressure Regimes

The external circuit in CCP discharges provides either fixed voltage or fixed current, which is atypical choice forpractical application. The fixed-current regime canbe represented simply by current density j = —jo sin(ty/) between two parallel electrodes. It canbe assumed that 

RF plasma density (n = i) is high and the electron condnctivity current exceeds the displacement current  

The inequality opposite to (4-93) is usually valid for ions because of much higher mass 

Moderate-pressure CCP discharges assume energy relaxation lengths smaller than sizes of plasma zone and sheaths L, Zp, which corresponds to the pressure interval 

---