Non-Isothermal Relaxation

Substituting this expression into (8.1.2) and assuming that the distribution function 0c a,t) varies with time slower than 4 c E,t), yields a coupled set of equations 

The first equation here is the energy relaxation equation with positive and negative sources. The quantities N+, N- depend functionally on Oc (we omit here these dependencies). Averaged over the energy operators, AD, X are to be calculated 

Using kinetic theory methods on a base of above mentioned kinetic equations one can derive transport equations for the macroparameters that describe different regimes of mass and heat transfer to the substrate and the thin film formation 

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