Nitrides single-molecule precursors

Keywords OMVPE Thin films Group 13 nitrides Single-molecule precursor (SMP) Nanostructures Gas-phase reactions Modeling... 

Nitride Films from Single-molecule Precursors 1040... 

Group 13 azides as single-molecule precursors for nitrides 1041... 

Single-Molecule Precursors (SMPs) for OMVPE of the Nitrides. 60... 

In the oxide literature, there are several reviews specific to the different families, such as layered transition metal oxides and metal phosphonates. Synthesis of metal nitrides has been discussed by Di Salvo. Precursor synthesis of oxides, chalcogenides and other materials is being pursued with vigour. - Thus, single-molecule precursors of chalcogenide containing compound semiconductors have b n developed. Kanatzidis has reviewed the application of molten poly-chalcophosphate fluxes for the synthesis of complex metal thiophosphates and selenophosphates. 

The applications generally involve the nitrides as a thin film. However, nanoparticulate materials are emerging as an important form of the material. In some cases (described in the appropriate subsection), a thin film or nanoparticulate material may be obtained from the same precursor molecule simply by changing the deposition conditions. This section on Al and Ga nitrides discusses both separate-source precursor combinations and single-source precursor approaches. The chemistry of these processes rather than the engineering aspects is described. However, the equipment and techniques employed are often the deciding factors in crystalline film growth. 

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