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Nanometer-level accuracy

Y. Mori, 2003, Fabrication of elliptical mirror at nanometer-level accuracy for hard x-ray focusing by numerically controlled plasma chemical vaporization machining . Rev. [Pg.493]

Figure 1.22 shows the workpiece-mounting table B and the feed unit for y-axis. These two units can be incorporated together or used separately. The built-in friction free air balance in the Y-axis guarantees the level of B table to be 0.04 pm/ 200 mm, as the Y-axis moves up and down. The accuracy has currently been improved upto nanometers. [Pg.24]


See other pages where Nanometer-level accuracy is mentioned: [Pg.617]    [Pg.617]    [Pg.50]    [Pg.42]    [Pg.140]    [Pg.233]    [Pg.309]    [Pg.29]    [Pg.164]    [Pg.145]    [Pg.412]    [Pg.104]    [Pg.34]    [Pg.104]    [Pg.3]    [Pg.266]    [Pg.215]    [Pg.95]    [Pg.29]    [Pg.45]    [Pg.484]   
See also in sourсe #XX -- [ Pg.617 ]




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