Nanometer-level accuracy

Y. Mori, 2003, Fabrication of elliptical mirror at nanometer-level accuracy for hard x-ray focusing by numerically controlled plasma chemical vaporization machining . Rev. 

Figure 1.22 shows the workpiece-mounting table B and the feed unit for y-axis. These two units can be incorporated together or used separately. The built-in friction free air balance in the Y-axis guarantees the level of B table to be 0.04 pm/ 200 mm, as the Y-axis moves up and down. The accuracy has currently been improved upto nanometers. 

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