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Monte Carlo-binary collision approximation

Lulli, G., et al., The Monte Carlo Binary Collision Approximation Applied to the Simulation of the Ion Implantation Process in Single-Crystal SiC High-Dose Effects, Mater. Sci. Forum, Vol. 335-356, 2001, pp. 599-602. [Pg.151]

The essence of Monte-Carlo models is to calculate the path of an ion as it penetrates a crystal. Early versions of these models used the binary collision approximation, i.e., they only treated collisions with one atom at a time. Careful estimates have shown that this is an accurate procedure for collisions with a single row of atoms (Andersen and Feldman, 1970). However, when the rows are assembled into a crystal the combined potentials of many neighboring atomic rows affect ion trajectories near the center of a channel. For this reason, the more sophisticated models used currently (Barrett, 1971, 1990 Smulders and Boerma, 1987) handle collisions with far-away atoms using the continuum string approximation,... [Pg.218]


See other pages where Monte Carlo-binary collision approximation is mentioned: [Pg.117]    [Pg.117]    [Pg.124]    [Pg.95]    [Pg.219]    [Pg.204]    [Pg.597]   


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