MOCVD metallo-organic chemical vapour

MOCVD metallo-organic chemical vapour deposition... 

The rapidly advancing applications of metal alkoxides for synthesis of ceramic materials by sol-gel/MOCVD (metallo-organic chemical vapour deposition) processes (Chapter 7) have more recently given a new impetus to intensive investigations on synthetic, reactivity (including hydrolytic), structural, and mass-spectroscopic aspects of oxo-alkoxide species. ... 

The alkoxides and aryloxides, particularly of yttrium have excited recent interest. This is because of their potential use in the production of electronic and ceramic materials,in particular high temperature superconductors, by the deposition of pure oxides (metallo-organic chemical vapour deposition, MOCVD). They are moisture sensitive but mostly polymeric and involatile and so attempts have been made to inhibit polymerization and produce the required volatility by using bulky alkoxide ligands. M(OR)3, R = 2,6-di-terr-butyl-4-methylphenoxide, are indeed 3-coordinate (pyramidal) monomers but still not sufficiently volatile. More success has been achieved with fluorinated alkoxides, prepared by reacting the parent alcohols with the metal tris-(bis-trimethylsilylamides) ... 

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