Microwave discharge pressure regimes

Figure 4-90. Three major regimes of nonequilibrium microwave discharges of moderate pressure.

Figure 9-43. Gas-separation selectivity of the acetate cellulose polymer membrane 5(riHe/ Hch,) as function of oxygen density in the plasma gas [O2] and microwave plasma treatment time 0. 100% O2 -b, 20% O2 and 80% N2 o, (0.1% O2 and 99.9% N2). The membrane treatment regime microwave pulse power2 kW pulsing period 2 ms pulse duration 100 /ts gas pressure in the microwave discharge chamber 2 Torr, nitrogen/oxygen ratio in the plasma gas N2 02 = 4 1 flow rate of the plasma gas 40 cm /s.

---