Micropumping membrane-actuated

Mixer 20 [M 20] Membrane-actuated Micropumping Micro Mixer... 

Figure 1.47 Schematic design of the membrane-actuated micropumping mixer (left) and photograph of the device (right) [30] (by courtesy of Kluwer Academic Publishers).

Mixer type Membrane-actuated micropumping micro mixer Membrane thickness 40 pm... 

Magnetic Pumps, Fig. 1 (a) Cross section of assembled micropump and (b) schematic cutout of membrane actuator (Reprinted from [2] with permission from Dr. Liu)... 

Membrane actuation for micropumps refers to the reciprocating periodic motion of a thin flexible layer - diaphragm or membrane made of silicon or other materials - bounding one side of a displacement micropump to create volume and pressure oscillations in a fluid (i.e., hquid or gas) stored in the chamber of the micropump that is rectified by other means to accomplish a net fluid flow through the micropump. The mechanical energy necessary for the membrane actuation in micropumps is generally derived from electrical, thermal, optical, or other forms of energy. 

Fig. 2 Schematic illustration of the principal types of membrane actuations in micropump, (a) Thin-film piezoelectric actuation, (b) stack piezoelectric actuator, (c) parallel plate electrodes for electrostatic actuation, (d) thermopneumatic actuation using thermal expansion of a secondary working fluid...

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