Micro carbon-based membrane reactors

Micro-devices with microchannels consisting of ceramic, polymer and silicon, etc. have been extensively fabricated to provide spaces (the walls of microchannels) for the contact of the reactant and product. However, for further enhancing the reactor, the integration of the separation function through the channel walls is believed to be very attractive. Therefore, we 

9 Schematic describing the preparation of a glassy carbon microstructure using a ROMS moid.  

Fabrication of carbonaceous microstructures has been reported also by Malladi et al. by spin-coating an SU-8 photoresistant material on a Si wafer. The photoresist material is coated on a Si wafer under a UV mask that transfers the pattern, which undergoes pyrolysis at 900°C in Nj atmosphere. This process allows the fabrication of suspended carbon microelec-tromechanical systems (C-MEMS), which are highly appreciated on sensor applications. 

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