Metal salts MOCVD

Many alkoxides in particular have been known since the 1960s, but interest in them has been stimulated recently by their potential use as precursors for deposition of metal oxides using the sol-gel or MOCVD process. A review covering the literature to 1990 has appeared. " Traditionally, alkoxides are made by salt-elimination reactions of lanthanide chlorides with alkali metal alkoxides (or aryloxides) which sometimes causes chloride retention... 

It is possible to use simple, less expensive, and less toxic precursors, which do not possess the Mgh pressure of vapor under saturation. This creates the possibility to apply some salts and metal-organic compounds that cannot be used with standard methods such as CVD and MOCVD... 

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