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Metal-containing polymers high-performance resist applications

Lammertink RGH, Korczagin I, Hempenius MA, Vancso GJ (2004) Metal-containing polymers for high-performance resist applications. In Abd-El-Aziz AS, Carraher CE, Pittman CU, Sheats JE, Zeldin M (eds) Macromolecules containing metal and metallike elements, vol 2. WUey, New York, p 115-133... [Pg.116]

Metal-Containing Polymers for High-Performance Resist Applications... [Pg.115]

Glass fibres, metal fibres, ceramic fibres, and high-performance polymer fibres are able to meet special requirements in special applications, such as filtration in high-stress, high-temperature, corrosive, or chemical hazardous environments. Filters containing fine glass fibres or glass microfibers are resistant to chemical attack but relatively brittle when pleated, and produce undesirable yield losses. [Pg.276]


See other pages where Metal-containing polymers high-performance resist applications is mentioned: [Pg.381]    [Pg.180]    [Pg.278]    [Pg.74]    [Pg.247]    [Pg.152]    [Pg.278]    [Pg.430]    [Pg.330]   


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