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Medium current beamlines

Fig. 15.3. Medium current beamline showing an electric scanner and electrostatic parallelizing lens. The ion source, analyzer magnet, and resolving aperture serve to inject the unscanned beam from the left. The parallel scanned beam on the right is passed through a postacceleration column and an electrostatic deflector before reaching the wafer... Fig. 15.3. Medium current beamline showing an electric scanner and electrostatic parallelizing lens. The ion source, analyzer magnet, and resolving aperture serve to inject the unscanned beam from the left. The parallel scanned beam on the right is passed through a postacceleration column and an electrostatic deflector before reaching the wafer...
See other pages where Medium current beamlines is mentioned: [Pg.218]    [Pg.218]    [Pg.219]    [Pg.218]    [Pg.218]    [Pg.219]    [Pg.218]    [Pg.218]    [Pg.219]    [Pg.218]    [Pg.218]    [Pg.219]    [Pg.230]    [Pg.230]   
See also in sourсe #XX -- [ Pg.218 ]

See also in sourсe #XX -- [ Pg.218 ]



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