Mechanical profilers

Figure 1 Mechanical profiler trace of a region on the unpolished back of a silicon wafer.

Figure 2 Mechanical profiler traces of craters sputtered with O2 primary beam for an initially smooth surface of Si3N4/Si (a) and an initially rough SiC surface (b).

Even though the mechanical profiler provides somewhat limited two dimensional information, no sample preparation is necessary, and results can be obtained in seconds. Also, no restriction is imposed by the need to measure craters through several layers of different composition or material type. 

Figure 3 shows an optical profiler trace of the same portion of the wafer sample analyzed by the mechanical profiler. The resulting line scan in Figure 3a is similar to that for the mechanical system. The average and root-mean-square roughness are... 

As an example, consider again the back surface of the silicon wafer used in the mechanical profiler example. Eigure 4a, an SEM micrograph taken at 45° tilt, shows a surface covered with various sized square-shaped features that often overlap. This information cannot be discerned from the mechanical profiler trace, but can be obtained using a 3D optical profiler measurement. Eigures 4b and 4c are also... 

Root DE, Flaherty SP, Kelley BP, Stockwell BR. Biological mechanism profiling using an annotated compound library. Chem Biol 2003 10 881-92. 

The experimental verification of that kind of model is difficult to achieve if only measurement techniques are available that deliver signals averaged over regions comparable to or even larger than the total extension of the mechanical profiles. Usually, when dealing with macroscopic measurement techniques, the profiles and the thickness of the interphase cannot be deduced from the measurements without additional presumptions. For the thickness of the interphase of thermoplastic polymer matrices, values smaller than 50 nm were given [196], whereas the interphase of thermosetting polymers was estimated as several hundreds of nanometres [197, 198]. 

D.E. Root, S.P. Haherty, B.R Kelley and B.R. Stockwell, Biological mechanism profiling nsing an annotated compound library, Chem. Biol, 2003,10, 881-892. 

In the following section we will apply the fluid-rock ratio Equations (56) and (57) to these infiltration-reaction curves by inserting values from the calculated continuum mechanics profiles into these equations. The idea is, that each calculated value represents a sample collected from a one-dimensional hydrothermal alteration profile. 

Aono H and Aeaki S (1988) Circadian rhythms in the urinary excretion of heavy metals and organic substances in metal workers in relation to renal excretory mechanism profile analysis. Int Arch Occup Environ Health 60 1-6. 

IlWhi White, K. L., Sue, H.-J. Electrical conductivity and fracture behavior of epoxy/polyamide-12/ multiwalled carbon nanotube composites. Polym. Eng. Sci. 51 (2011) 2245-2253. llZha Zhang, G., Rasheva, Z., Karger-Kocsis, J., Burkhart, T. Synergetic role of nanoparticles and micro-scale short carbon fibers on the mechanical profiles of epoxy resin. eXPRESS Polym. Lett. 5 (2011) 859-872. 

The primary mechanical profile of material can be summarized in two groups of parameters (1) stiffness (flexvual or tensile modulus, yield stress, heat deflection temperature) and (2) toughness (impact strength, breaking stress). 

The user must confirm the usefulness of this a calculation based on the particular measurement circumstances. It may have strong frequency limitations and not agree with surface roughness derived from optical or mechanical profile instruments [which can have different spatial frequency limits (15)]. 

Destructive depth profiling, which includes sputtter and mechanical profiling in conjunction with surface analytical methods... 

With multiple activity variables, score plots of the Y part of the model (i.e., ui versus U2, and U versus 3) indicate the presence of outliers in the activity space Y. The absence of outliers in Y space is a very valuable indication of homogeneity of the biological mechanism profile over the studied set... 

Scheme 13.1 Mechanism profile of visible-light-induced photocatalysis.

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