Low Energy Productivity Beam Utilization

Increasing beam currents through improvements in beam transport is only part of the solution for improving productivity. The other part is to minimize the time the beam spends off the water, characterized as beam utilization. We present here a treatment of utilization, developed by Brown et al. (2004). We then include a categorization of implanters commercialized over the last 35 years, in terms of beam type and scanning mechanism and the implication of each implanter s architecture on beam utilization. 

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High-energy radiation may be classified into photon and particulate radiation. Gamma radiation is utilized for fundamental studies and for low-dose rate irradiations with deep penetration. Radioactive isotopes, particularly cobalt-60, produced by neutron irradiation of naturally occurring cobalt-59 in a nuclear reactor, and caesium-137, which is a fission product of uranium-235, are the main sources of gamma radiation. X-radiation, of lower energy, is produced by electron bombardment of suitable metal targets with electron beams, or in a... 

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