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Laser direct-write systems

Fig. 10 Two-photon direct writing laser microfabrication system. The Galvano mirror set is used for scanning the laser beam in the two horizontal dimensions, and along the longitudinal direction a PZT stage is used. The laser power was continuously adjusted by a neutral density (ND) filter. The polarization beam splitter (PBS) lets the laser beam pass but reflects the illumination light to the CCD monitor for in-situ monitoring of the fabrication process. OL objective lens... Fig. 10 Two-photon direct writing laser microfabrication system. The Galvano mirror set is used for scanning the laser beam in the two horizontal dimensions, and along the longitudinal direction a PZT stage is used. The laser power was continuously adjusted by a neutral density (ND) filter. The polarization beam splitter (PBS) lets the laser beam pass but reflects the illumination light to the CCD monitor for in-situ monitoring of the fabrication process. OL objective lens...
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See also in sourсe #XX -- [ Pg.337 ]



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