Ionization glow

Figure 3.12 Comparison of dissociation and ionization glows with and without anode magnetron (a) with anode magnetrons, and (b) without anode magnetrons.

CHANGE OF DISSOCIATION GLOW AND IONIZATION GLOW WITH REACTION TIME... 

The direct evidence to show that reactive species are created in the dissociation glow rather than in the ionization glow was found in the in situ Optical Emission Spectroscopy (OES) analysis aimed specifically at the dissociation glow and at the ionization glow of TMS DC discharge in a closed system [4]. Figures 4.4 and 4.5... 

Figure 4.6 Dissociation glow and ionization glow in DC glow discharge of TMS and respective OES species material forming species are mainly in the dissociation glow and the ionization glow consists of mainly hydrogen species.

Figure 4.9 The development of the ionization glow with discharge time in TMS RF discharge.

The material formation in LCVD is caused by the dissociation glow (DG) and the ionization glow (IG). In DC discharge, the material formed in the cathode glow deposits nearly exclusively on the cathode surface due to the adherence of DG to the cathode, but some of them could deposit on surfaces in the reactor. The situation with the material formed in the negative glow is the same, i.e., it could deposit on the cathode, the anode, and surfaces placed in the reactor. Distribution of the deposition (to the cathode and the anode) is dependent on the distance between the cathode and the anode. Consequently, the total deposition on the cathode is also dependent on the distance. 

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