Interproximity effect

One type of proximity effect—the interproximity effect—involves the exposure of features near the ones that are intentionally q>osed, referred to as near neighbors. Une q)osed spaces between lines are exposed by backscattered electrons. This effect is seen in the work performed for this study. The interproximity effect causes unexposed spaces in positive resists to become thinner and narrower. For negative resists, such as ours, the unexposed region is filled with scumming resist. 

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