Imaging Projection printing

Figure 3.29. (top) Positive and (bottom) negative images projection printed in a polyijp-formyloxystyrene) resist. Reproduced from reference 103. Copyright 1984 American Chemical Society.)... 

Figure 3.30. SEMs of (top) positive and (bottom) negative J- xm images projection printed in a tertiary butyl ester-onium salt resist. Reproduced with permission from reference 105. Copyright 1986 Electrochemical Society.)...

Figure 3.64. SEMs of 0.7- xm images projection printed with the experimental KrF excimer laser setup shown in Figure 3.63. (Reproduced with permission...

Feilchenfeld, N. B., Baron, P. X, Kovacs, R. K., Au, D. T. W., and Rust, R. D., Further Progress with Magnified Image Projection Printing for Fine Conductor Formation, presentation at the IPC Fall... 

Figure 5. Scanning electron micrograph of negative images projection-printed at 0.4 mJ/cm of 248 nm radiation in preliminary tertiary alcohol resist containing...

Figure 9. Poly silane bilayer resist, top layer 0.25 am experimental polysilane, bottom layer 1.0 am of hardbaked photoresist, projection printed at 313 nm with 02-RIE image transfer.

The photoresists are exposed through a mask by contact or projection printing with the 3650, 4050, and 4350A° mercury lines. Electron beams 5-30KV and x-rays 2-lOA have also been employed. The positive resist reproduces the mask or image in a direct positive replication while a negative resist reproduces an image reversal of the opaque portions of the mask. 

This first photograph was in effect a projection printed lithographic image," taken no doubt on a fine day since the image shows both sides of the courtyard to be illuminated. This is because the exposure took 8-10 hours, during which time the sun moved. 

Lin, Partially coherent imaging in two dimensions and theoretical limits of projection print ing in microfabrication, IEEE Trans. Electron Dev. 27(5), 931 938 (1980). 

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