1,1,1,3,3,3-Hexafluoro-2-isopropanol HFIP

Figure 19.6 shows the CP/MAS NMR spectra of unannealed A-PVA films prepared from aqueous, dimethyl sulphoxide (DMSO) and hexafluoro-isopropanol (HFIP) solutions [41]. It is found that the relative intensities of the CH triplet of the sample prepared from the aqueous solution are signifi-... 

GPC chromatograms were obtained from solutions prepared in either diehloromethane (DCM) or hexafluoro-isopropanol (HFIP). Samples for both DCM and HFIP were obtained from blends which were initially dissolved in TCE for NMR analysis. Polycarbonate standards were used for calibration of DCM chromatograms. HFIP chromatograms were calibrated with Polybutyleneterephthalate standards. 

Analysis of annealed samples by Gel-permeation-chromatography (GPC) in both dichloromethane (DCM) and hexafluoro-isopropanol (HFIP) revealed further details on how PC and PET behave during transesterification. Molecular weights were followed in both media by the peak positions in the chromatograms (Mp). 

Room temperature fluorocarbon-containing solvents, such as 2,2,2-trifluoroethanol (TFE) and hexafluoro-2-isopropanol (HFIP)... 

An alternative approach to 157 nm resist development was presented, employing fluoroaromatic polymers, that represent an evolutionary step in resist materials development. Both partially blocked and copolymers of 4-hexafluoro-isopropanol styrene have been synthesized and characterized. Both absorb less than 4/C at 157 nm. Both the acetals and die t-B(X blocking groups lower the absorbance further and the 100% blocked HFIP/BOM has an extrapolated O.D. of 2.06/D. Thermal properties were also measured and shown to te dependent upon the degree of blocldng as is the case in PHS-based resists. 

Hexafluoro-2-isopropanol (HFIP) with 0.05M Sodium Trifluoroacetic Acid 0.35 mL/min 30 C... 

---