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X-Ray Absorption Near-Edge Structure and Optical Properties of Hafnium Oxynitride Thin Films... [Pg.81]

Hafnium oxynitride (Hf-O-N) thin films have attracted interest because of their unique properties, particularly their high dielectric constant, relatively large... [Pg.81]

Chisaka et al. synthesized carbon-supported haMum oxynitrides (HfO , Ny-C) by heating carbon-supported hafnium oxide tmder NH3 gas [82]. They revealed that... [Pg.402]

See other pages where Hafnium oxynitride is mentioned: [Pg.81] [Pg.81]