Glow discharge planar cathodes

Figure 2.23 Principle of glow discharge ion source with planar (disc) cathode.

The simplest approach for the deposition of ZnO films by sputtering is sketched in Fig. 5.1 A DC glow discharge is ignited between a cathode, which is a planar Zn target, and the anode, which is the chamber of the vacuum system. The system is pumped to a pressure of T0Pa and Ar and O2 are introduced into the system. 

Conventional mode of DC glow discharge (C-A), where the cathode (C) and the anode (A) are planar electrodes without magnetic enhancement. 

Internal electrode reactors have several names, e.g., flat bed, parallel plate, planar, diode, etc. However, this system is rarely used to develop the plasma polymerisation because it breaks the insulation between the electrodes due to polymerisation on the cathode by the dc glow discharge. 

FIGURE 40.7 The five common glow discharge source configurations. (A) Coaxial cathode. (B) Planar diode. (C) Hollow cathode. (D) Hollow cathode plume. (E) Grimm type. Adapted from Reference [132]. 

Figure 2 Different glow discharge source configurations (A) coaxial cathode (B) planar diode (C) hollow cathode lamp (D) hollow cathode plume (E) Grimm source. Reprinted from Bogaerts A and Gijbels R (1998) Fundamental aspects and applications of glow discharge spectrometric techniques (Review). Spectrochimica Acta Part BSZ. 1-42, with permission from Eise-vier Science.

Gamez G., Bogaerts A., Andrade E., and Hieftje G. M. (2004) Eunda-mental studies on a planar-cathode direct current glow discharge, Part I Characterization via laser scattering techniques, Spectrochim. Acta, Part B 59 435-447. 

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