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Glow discharge getters

Silicon is normally applied via glow discharges or the injection of silane (SiH4). As silicon is non recycling and sticks on the PFCs, a more or less continuous getter effect for oxygen will result. However, this is not so easily... [Pg.152]

Mei Y. and Harrison W. W. (1991) Getters and plasma reagents in glow discharge mass spectrometry, Spectrochim Acta, Part B 46 175—... [Pg.345]

See other pages where Glow discharge getters is mentioned: [Pg.117] [Pg.61] [Pg.117] [Pg.276] [Pg.276] [Pg.315] [Pg.165]

See also in sourсe #XX -- [ Pg.265 , Pg.283 ]

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Getters

Glow

Glow discharge