Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Glasses in Microelectronics

Spin-On Glass. In microelectronic appHcations, films of siHcon dioxide are deposited on siHcon substrates by the appHcation of a partially hydroly2ed solution of tetraethoxysilane or methyltriethoxysilane (59,60). A product based on this technology is marketed under the name Accuspin by AHiedSignal. [Pg.40]

R.R. Tummala and R.R. Shaw, Glasses in Microelectronics in the information-processing industry, in Advances in Ceramics, Vol. 18 Commercial Glasses, D.C. Boyd and J.F. MacDowell (eds.), American Ceramic Society, Westerville, OH, 1986, pp. 87-102. [Pg.166]

See other pages where Glasses in Microelectronics is mentioned: [Pg.14]    [Pg.556]    [Pg.558]    [Pg.560]    [Pg.564]    [Pg.566]    [Pg.568]    [Pg.570]    [Pg.572]    [Pg.574]    [Pg.578]    [Pg.580]    [Pg.582]    [Pg.584]    [Pg.586]    [Pg.588]    [Pg.590]    [Pg.592]    [Pg.594]    [Pg.596]    [Pg.598]    [Pg.600]    [Pg.602]    [Pg.604]    [Pg.606]    [Pg.608]    [Pg.610]    [Pg.612]    [Pg.614]    [Pg.616]    [Pg.618]    [Pg.620]    [Pg.622]    [Pg.624]    [Pg.626]    [Pg.628]    [Pg.630]    [Pg.632]    [Pg.634]    [Pg.636]    [Pg.638]    [Pg.640]    [Pg.642]    [Pg.644]    [Pg.646]    [Pg.648]   


SEARCH



Microelectronic

Microelectronics

© 2024 chempedia.info