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Gas Inlet Injectors

The reaction chamber is the heart of a CVD system where chemical vapour deposition takes place. It consists of retort, gas inlet injector, distributor and outlet exit. The quality of the deposit is mainly dependent on the design of the reaction chamber, which determines the uniformity of temperature, concentration and pressure. [Pg.78]


See other pages where Gas Inlet Injectors is mentioned: [Pg.92]    [Pg.92]    [Pg.37]   


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