Fundamentals of DLTS

3 DEEP LEVEL TRANSIENT SPECTROSCOPY 9.3.1 Fundamentals of DLTS 

The analysis of capture and emission is based on the usual master equation  

While this simple picture suffices to explain the vast majority of DLTS results, it does not in general hold for pore-related traps. The reason 

In this case, Equations (9.1)—(9.3) cannot be solved in closed form, except for special cases of t . However, it is possible to write a general, transcendental, integral equation for f(t), describing both capture and emission [10]  

---