Friction and Wear of Thin Solid Films

4 Microscale Friction and Wear of Thin Solid Films 

The microscale friction and wear behavior of thin film of gold (Au) which was prepared in a vacuum sputtering apparatus was investigated. The substrate is Si(lOO) wafer. The film thickness is about 800 nm. For comparison, the microscale friction and wear of the substrate was also studied. 

The tests were carried out in an atomic force microscope and friction force microscope developed by the au- 

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/) is the signal of friction force obtained by scanning along the direction of Y and -Y, respectively. f i,/) is the signal of real friction force, foii,/) is the signal produced by other lateral forces except friction force. Hence, the 

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