Fluorinated Polyimides for Optical Components

With the progress in optical communications, there has been a corresponding demand for the use of polyimides in optical components. Table 15.1 summarizes the primary requirements for optical communication materials and the approach used in this work. Thermal stability above 300°C is required for compatibility with conventional 1C fabrication. Polyimides have sufficient thermal stability in addition to easy processability for this use.z 

Requirements for optical process Requirements for materials Approach 

Compatibility with IC Thermal stability Selection of polyimide 

Low optical loss High transparency Introduction of fluorine 

Refractive index matching Precise control of refractive Copolymerization 

Compatibility with IC fabrication process Thermal stability Processability Selection of polyimide 

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