Example Calculation Single Isotropic Thin Film

1 Example Calculation Single Isotropic Thin Film 

With a single film of refractive index n, and thickness dx present, the L and K matrices are 

From this result, the reflection and transmission coefficients for an interface containing a single film are 

Equations (3.21) and (3.22) can be used for either s or p polarized light. To use them for a specific polarization, the appropriate forms of the reflection and transmission 

The results of this model calculation can be used to extract unknown film properties, such as the film refractive index and thickness. Normally, however, an ellipsometer will yield only two independent observables (the two ellipsometric angles defined in equation (3.6), for example). For that reason, only two film properties can be extracted from a single measurement. If the film is nonabsorbing with a real refractive index, an ellipsometric measurement can provide the real part of the refractive index, n, and the thickness. For 

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