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TABLE 5.3 Relationships between Pad Properties and Polishing Performance [1]. [Pg.130]

Density Removal rate. Detectivity Dishing, erosion Yes [Pg.130]

Hardness Macroscratches Detectivity Detectivity, roughness, dishing. Yes [Pg.130]

See other pages where Effects of Pad Property on Polishing Performance is mentioned: [Pg.129] [Pg.145]

PAD