Effective discharge power

Plasma power variation. In Figure 19 are shown the effects of RF power on the partial pressures of silane, hydrogen, and disilane (Fig. 19a) and on the deposition rate (Fig. 19b). The total pressure is 40 Pa, and the RF frequency 50 MHz. The discharge is in the y -regime. Results are shown as a function of the supposed effective RF power, i.e., 50% of the power set at the power source. 

Figure 14.5 Effect of power of the discharge on the nitrogen concentration (determined by AES) in Mo-N films (from Reference 11). The different phases observed by XRD, RHEED and THEED are indicated. The nitrogen pressure was 13.3 Pa and the substrate (MgO) did not undergo any external heating.

The effect of reactor size on the deposition characteristics was investigated by comparing deposition rate profiles of plasma polymerized perfiuoropropene films in three reactors of different size. The local deposition rates were measured at various operating conditions (combinations of three monomer pressures and three discharge powers), which are listed in Table 19.1. Deposition rate profiles along the reactor tube in three reactors are shown in Figures 19.2, 19.3, and 19.4 for the corresponding... 

The effects of the discharge power on the distribution of polymer deposition in a tubular reactor (Fig. 20.1) are shown in Figures 20.19-20.22. Figure 20.19 depicts the change in polymer deposition pattern due to the discharge power observed in the plasma polymerization of styrene at a fixed flow rate of 5.6 seem. 

Figure 20.19 Effect of discharge power on the distribution of polymer deposition from...

Figure 20.20 Effect of discharge power on the distribution of polymer deposition from styrene at a flow rate of 1.9seem key 3, TOW Q, 40 W , 27W.

These results pointed out the importance of the cathodic plasma treatment of CRS. In order to examine the effect of the pretreatment process on the corrosion performance, two sets of experiments were carried out in which (Ar + H2) plasma treatment time (at a fixed wattage of SOW) and the discharge power (at a fixed treatment time of 12 min) were varied while all other operational parameters were kept constant. The results are shown in Figure 33.6, which clearly shows that the cathodic plasma treatment of CRS is a crucially important factor indicating the importance of the removal of oxides in this interface engineering approach. 

Figure 33.6 Effect of (Ar + H2) plasma pretreatment of steel surface on the corrosion performance of E-coat/plasma polymer combined coating system (a) effect of treatment time, (b) effect of discharge power.

Figure 3. Effect of power input on the abundance of ions in a microwave discharge in nitrogen...

Figures 7 and 8 show the intensity of the 0,5 Vegard-Kaplan band, the 0,3 NO y band, and the 0,6 NO / band in the discharge bulb as a function of the NO concentration that would have existed in the stream if no destruction of NO occurred. Also shown are the responses of the yellow photomultiplier and the ultraviolet photomultiplier, both of which are located at the downstream bulb. Figure 7 represents effects occurring at high discharge power, where [N] and [O] are more easily followed. Phenomena beyond the null (at [NO] 3.5 X 1012) are complex in Figure 7 but simplified in Figure 8, where the excitation power is low. The broken lines in Figure 8 represent behavior expected at low [NO],...

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