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Dynamic plowing lithography

Another group of experiments [254-256] was intended to perform lithography in tapping mode. Even if these techniques are very similar to Dynamic Plowing Lithography, they are, strictly speaking, not exactly the same, and... [Pg.152]

Dynamic plowing lithography (DPL), i.e. the lithography technique in tapping mode in which the force between tip and sample is increased by suddenly increasing the amplitude of the cantilever oscillations, has been developed by Klehn and coworkers [257-260]. The topography of the sample is acquired with a normal, small amplitude of the cantilever oscillations. When the amplitude is increased, the feedback makes the sample approach to the tip, in order to keep constant the oscillation amplitude, and the tip indents the sample. [Pg.153]

Diffusion 127 -, anomalous 39, 42-43, 65 Diffusion-reaction model 141 Diffusivity, thermal 149 Diglycidylether of bisphenol-A (DGEBA) 141 Disordered structure 12 Dispersion 9-10,30,32,36,48 Dynamic plowing lithography 153... [Pg.229]

Lithography AFM Oxidation Lithography STM Lithography AFM Lithography-Scratching AFM Lithography-Dynamic Plowing... [Pg.359]

See other pages where Dynamic plowing lithography is mentioned: [Pg.88]    [Pg.89]    [Pg.153]    [Pg.154]    [Pg.182]    [Pg.187]    [Pg.88]    [Pg.89]    [Pg.153]    [Pg.154]    [Pg.182]    [Pg.187]    [Pg.87]   
See also in sourсe #XX -- [ Pg.153 ]



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