Dual emission laser induced

In this section, some case studies will be presented on the characterization of CMP pad and slurry [17-20] using such advanced analytical techniques as dynamic mechanical analysis (DMA), modulated differential scanning calorimetry (MDSC), thermal gravimetric analysis (TGA), thermal mechanical analysis (TMA), dynamic rheometry, dual emission laser induced fluorescence (DELIF), and the dynamic nuclear magnetic resonance (DNMR). More specifically, these techniques were used to characterize (a) the effect of heat... [Pg.32]

Pad-Wafer Contact and Slurry Transport Dual Emission Laser Induced Fluorescence... [Pg.43]