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Dielectric materials pore generation methods

NANOPOROUS DIELECTRIC MATERIALS AND PORE GENERATION METHODS... [Pg.1816]

In this review, nanoporous dielectric materials have been presented. The preparation techniques, methods of pore generation, and materials classification were discussed. Inorganic, organic, and hybrid films were also discussed. The nanoporous dielectric films were classified by preparation method, which includes block copolymer, solvent as porogen approach, surfactant templating, and sol-gel approach. This is still a very active field of research because no one film has satisfied all the stringent requirements in semiconductor device processing. [Pg.1822]

See other pages where Dielectric materials pore generation methods is mentioned: [Pg.1816]    [Pg.47]    [Pg.114]    [Pg.114]    [Pg.576]    [Pg.142]    [Pg.15]   
See also in sourсe #XX -- [ Pg.1816 ]



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