Depth Profiling and Related Aspects

4 Depth Profiting and Related Aspects In the area of Dynamic SIMS, depth profiling is the most heavily used of the three data collection modes. As an example, this mode is used for over 90% of the semiconductor research and development work. The collection of mass spectra before depth profiling or imaging tends to be used to reveal the most useful analytical signals. Imaging tends to find heavier usage in areas such as the Biosciences. 

The depth resolution defines the minimum depth over which two signals can be separated. This parameter, discnssed in Section 5.1.1.2.1, depends on  

The primary ion beam conditions, inclnsive of the resnlting data point density 

The sample is spatially homogeneous over the area analyzed 

The sample s snrface is free of foreign objects (dust, particles, fibers, etc.) 

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