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Deposition of Acids, Elements, and their Compounds

This review has described the synthesis, structure and reactivity of important classes of group 13/15 compounds such as Lewis acid base adducts and heterocycles. In addition, their potential to serve as single source precursors for the deposition of the corresponding binary materials by MOCVD process has been demonstrated. Because of the large number of compounds containing the lighter elements of group 15, N, P and As, these... [Pg.306]

See other pages where Deposition of Acids, Elements, and their Compounds is mentioned: [Pg.51] [Pg.52] [Pg.54] [Pg.56] [Pg.60] [Pg.62] [Pg.64] [Pg.66] [Pg.68] [Pg.1830] [Pg.51] [Pg.52] [Pg.54] [Pg.56] [Pg.60] [Pg.62] [Pg.64] [Pg.66] [Pg.68] [Pg.1830] [Pg.303] [Pg.51] [Pg.303] [Pg.303] [Pg.51] [Pg.717] [Pg.923] [Pg.598] [Pg.267] [Pg.154] [Pg.261] [Pg.485] [Pg.328] [Pg.246] [Pg.562] [Pg.478] [Pg.452] [Pg.110] [Pg.357] [Pg.665] [Pg.657] [Pg.8] [Pg.114] [Pg.739] [Pg.703] [Pg.737] [Pg.657]

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Acid deposition

Acidic deposition

Compounds acids and

Deposition of acids

Elements compounds