Deposition in a CVD Flow Reactor

The sequence of events described above occurs at any given spot in a CVD flow reactor. As an example, one can consider the deposition of tungsten on the interior wall of a graphite tube by the hydrogen reduction of the fluoride as follows  

As shown schematically in Fig. 2.4a, the reactant gases are introduced in the upstream side, then flow down the reactor tube, and exhaust downstream through the vacuum pump. 

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