Decay rate of ozone

By adding carbonate to ozonated water, the half-life of ozone can be increased. Even some few pmoles decrease the decay rate of ozone by about a factor of ten or more (Hoigne and Bader, 1977). Increasing the concentration of bicarbonate/carbonate up to a concentration of 1.5 mM increases the stability of ozone. Thereafter no further stabilization occurs (Forni et al., 1982). 

M-1 cm-1). The decay rate of ozone is about a factor of 1 000 higher than that of H202 (Guittonneau et al., 1991). 

Table 4-1 A comparison of reported reaction orders for the decay rate of ozone in phosphate buffered solutions of demineralized water.

The absorption of ozone into water and the processes for the wafer (cleaning, photoresist removal etc.) are often two separate systems with distances between them of up to 40 m. Therefore the decay rate of ozone or at least the liquid ozone concentration near the point of use should be measured to insure reproducibility of the process. 

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