CVD M

With the seventh chapter, we move away from CVD. M.A. Malik and P. O Brien present a review of Organometallic and Metallo-Organic Precursors for Nanoparticles . Nanoparticles have been recognized as suitable systems for studying the transition from the molecular to the macrocrystalline level and exhibiting imusual chemical and physical properties. They have thus been... 

Chemical vapour deposition (CVD) Chemical reaction causing gaseous M, compound to split up and release M, to deposit on M2 Healed Mj Igas solid 2 M, Cr M2 Fe... 

The simplest transition metal carbonyls are mononuclear of the type M(CO)x, in other words those with only one metal atom. They are hydrophobic but soluble to some extent in nonpolar liquids, such as n-butane or propane. The dinuclear carbonyls are more complex but have the same general characteristics as the mononuclear carbonyls. The carbonyls, which are or could be used in CVD, are listed in Table 3.4 with some of their properties. 

Harding, J. T., Kazarof, J. M., and Appel, M. A., Iridium-coated Rhenium Thrusters by CVD, NASA Technical Memo. 101309, NASA Lewis Res. Cent., Cleveland, OH (1988)... 

Hoffman, D. M., et al., Plasma-Enhanced CVD of Silicon Nitride Films from a Metallo-Organic Precursor, J. Mater. Res., 9(12) 3019-3021 (1994)... 

Mazille, H. M. J., CVD of Chromium onto Nickel, Thin Solid... 

Schafer, L., Saltier, M., and Klages, C. P., Upscaling of the Hot-Filament CVD Process for Deposition of Diamond Films on Large-Area Substrates, m Applications of Diamond Films and Related Materials, (Y. Tzeng, et al., eds.), Elsevier Science Publishers, pp. 453-460(1991)... 

Lartigue, S., Cazajous, D., Nadal, M., and Male, G., Study of Boron Carbide Vapor-Deposited under Low Pressure, Proc. 5th. European Conf. on CVD, (J. Carlsson and J. Lindstrom, eds ), pp. 403-410, Univ. ofUppsala, Sweden (1985)... 

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