Cross-linked coatings network degradation

Network Formation and Degradation in Urethane and Melamine-Formaldehyde Cross-Linked Coatings... 

Baked coatings of novolac-based resists have been observed to produce the most planar coatings because they flow before they are cross-linked by the thermolysis of the multifunctional NDS compounds that are present in the resist. The resulting networks are not degraded by UV exposures and thus cannot be used in the PCM scheme however, they are thermally stable enough to allow the deposition of the refractory oxides necessary for the etch barriers in the trilayer scheme. 

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